ESC(ElectroStatic Chuck)
The electrostatic chuck is a device for generating an attracting force between an electrode and an object at a voltage applied to the electrode. ESC is used in a variety of semiconductor and display processes to hold the wafer or display during processing.
ESC Specification
(1) Adsorbing various objects such as：metal conductor, semiconductor, display, insulator (glass), and porous materials.
(2) Working well in vacuum environment.
(3) No electrostatic side-effect : No affect on the backside of an object sucj as TFT circuit, because electric field cannot reach it.
(4) Zero effect on object by using adsorption : uniform force is applied on the surface causing no indentation, scratch or any other damage.
(2) Working well in vacuum environment.
(3) No electrostatic side-effect : No affect on the backside of an object sucj as TFT circuit, because electric field cannot reach it.
(4) Zero effect on object by using adsorption : uniform force is applied on the surface causing no indentation, scratch or any other damage.
