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ESC(ElectroStatic Chuck)

The electrostatic chuck is a device for generating an attracting force between an electrode and an object at a voltage applied to the electrode. ESC is used in a variety of semiconductor and display processes to hold the wafer or display during processing.
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ESC Specification

​(1)  Adsorbing various objects such as:metal conductor, semiconductor, display, insulator (glass), and porous materials.
(2) Working well in vacuum environment.
(3) No electrostatic side-effect : No affect on the backside of an object sucj as TFT circuit, because electric field cannot reach it. 
(4) Zero effect on object by using adsorption : uniform force is applied on the surface causing no indentation, scratch or any other damage.
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