ESC(ElectroStatic Chuck)
The electrostatic chuck is a device for generating an attracting force between an electrode and an object at a voltage applied to the electrode. ESC is used in a variety of semiconductor and display processes to hold the wafer or display during processing.
ESC Specification
(1) Adsorbing various objects such as:metal conductor, semiconductor, display, insulator (glass), and porous materials.
(2) Working well in vacuum environment.
(3) No electrostatic side-effect : No affect on the backside of an object sucj as TFT circuit, because electric field cannot reach it.
(4) Zero effect on object by using adsorption : uniform force is applied on the surface causing no indentation, scratch or any other damage.
(2) Working well in vacuum environment.
(3) No electrostatic side-effect : No affect on the backside of an object sucj as TFT circuit, because electric field cannot reach it.
(4) Zero effect on object by using adsorption : uniform force is applied on the surface causing no indentation, scratch or any other damage.